Characterization and properties of Zn-O-Se ternary system thin films deposited by radio-frequency (rf)-magnetron sputtering

	Characterization and properties of Zn-O-Se ternary system thin films deposited by radio-frequency (rf)-magnetron sputtering
其他题名	论文其他题名
	Pan H. L.; Yao B.; Ding M.; Deng R.; Yang T.; Sui Y. R.; Zhao T. T.; Gao L. L.
	2010
发表期刊	Journal of Non-Crystalline Solids
ISSN	0022-3093
卷号	356 期号:18-19 页码:906-910
摘要	Zn-O-Se alloy films were grown on quartz substrate by radio-frequency rf-magnetron sputtering ZnSe single crystal target, with high pure Ar and O(2) as working gas. X-ray diffraction and transmission electron microscopy characterizations indicate that the films are amorphous state. Energy disperse spectroscopy and X-ray photoelectron spectroscopy measurements verify the amorphous Zn-O-Se alloy was Se doped ZnO(2) (Zn(1-x)Se(x)O(2)), in which both Zn and Se atoms are bound with O atom. Absorption spectra exhibit that the optical band gap of Zn(1-x)Se(x)O(2) films are 4-5 eV. After annealing at 673 K in Ar ambient for 15 min, Zn(1-x)Se(x)O(2) film was decomposed to ZnO and SeO(2), and SeO(2) sublimed while annealed. The band gap energy decreased to the 3.2 eV, which is similar to the value of ZnO film directly deposited on quartz substrate. Room-temperature photoluminescence spectrum of the film after annealed shows NBE emission at 3.26 eV. (C) 2009 Published by Elsevier B.V.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26099
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Pan H. L.,Yao B.,Ding M.,et al. Characterization and properties of Zn-O-Se ternary system thin films deposited by radio-frequency (rf)-magnetron sputtering[J]. Journal of Non-Crystalline Solids,2010,356(18-19):906-910.
APA	Pan H. L..,Yao B..,Ding M..,Deng R..,Yang T..,...&Gao L. L..(2010).Characterization and properties of Zn-O-Se ternary system thin films deposited by radio-frequency (rf)-magnetron sputtering.Journal of Non-Crystalline Solids,356(18-19),906-910.
MLA	Pan H. L.,et al."Characterization and properties of Zn-O-Se ternary system thin films deposited by radio-frequency (rf)-magnetron sputtering".Journal of Non-Crystalline Solids 356.18-19(2010):906-910.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Pan-2010-Characteriz（408KB）			开放获取	--	浏览下载