Development of the workbench yaw angle correction mechanism of large grating ruling machine

	Development of the workbench yaw angle correction mechanism of large grating ruling machine
	Yang C.; Yu H.; Mi X.; Bayanheshig; Tang Y.
	2014
发表期刊	Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument
ISSN	ISBN/02543087
卷号	35 期号:5 页码:1065-1071
摘要	If large grating ruling machine has yaw angle error, it will directly affect the quality of the ruling grating wave-front. First, the mapping relation between yaw angle error and wave-front quality in Littrow form is obtained through calculation. Secondly, the working principle of correcting the yaw angle with double piezoelectric actuators is discussed, the yaw angle measurement optical path is designed, and the yaw angle correction capability of the workbench with this structure is measured. Finally, the ruling experiments were carried out on the workbench using the above structure. Experiment results indicate that on the grating ruling machine with 400 500 grating ruling capability, using double piezoelectric actuators to correct the yaw angle error of the workbench, the correction requirement for travel range of 5 m and angle range of 2 can be achieved. The experiment results show that the yaw angle of the workbench is reduced from 0.42 to 0.02 after yaw angle error correction; the yaw angle error is decreased by 95.24% compared with that before correction, which satisfies the requirement of the yaw angle correction accuracy of the workbench and improves the quality of the grating wave-front. The experiment results provide a theoretical and technical support for ruling large and high-precision gratings.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43892
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yang C.,Yu H.,Mi X.,et al. Development of the workbench yaw angle correction mechanism of large grating ruling machine[J]. Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument,2014,35(5):1065-1071.
APA	Yang C.,Yu H.,Mi X.,Bayanheshig,&Tang Y..(2014).Development of the workbench yaw angle correction mechanism of large grating ruling machine.Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument,35(5),1065-1071.
MLA	Yang C.,et al."Development of the workbench yaw angle correction mechanism of large grating ruling machine".Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument 35.5(2014):1065-1071.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
大光栅刻划机工作台的摆角矫正机构研制_杨（502KB）			开放获取	CC BY-ND	浏览下载