Research on opto-mechatronics integration optimization method of the Scatch System of the grating ruling machine

	Research on opto-mechatronics integration optimization method of the Scatch System of the grating ruling machine
	Shen Y.; Wang J.-J.; Zhu C.-A.; Qi X.-D.
	2014
发表期刊	Hunan Daxue Xuebao/Journal of Hunan University Natural Sciences
ISSN	ISBN/16742974
卷号	41 期号:3 页码:43-48
摘要	To address large diffraction grating ruling engines' characteristics of micro nano processing at the macroscopic scale and to solve the problem of nanometer scale detection, this paper proposed a method of opto-mechatronics integration optimization. Firstly, computational Fourier optics and the theory of string vibration were used in error analysis. Then, the analysis results were verified by vibration test and optical measurement. Finally, intelligent optimization methods were used to optimize structural parameters. The validity of the opto-mechatronics integration optimization has been verified by simulating a virtual prototype, which has shown that the vibration amplitude of the Scatch System has reduced by 30%.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44340
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Shen Y.,Wang J.-J.,Zhu C.-A.,et al. Research on opto-mechatronics integration optimization method of the Scatch System of the grating ruling machine[J]. Hunan Daxue Xuebao/Journal of Hunan University Natural Sciences,2014,41(3):43-48.
APA	Shen Y.,Wang J.-J.,Zhu C.-A.,&Qi X.-D..(2014).Research on opto-mechatronics integration optimization method of the Scatch System of the grating ruling machine.Hunan Daxue Xuebao/Journal of Hunan University Natural Sciences,41(3),43-48.
MLA	Shen Y.,et al."Research on opto-mechatronics integration optimization method of the Scatch System of the grating ruling machine".Hunan Daxue Xuebao/Journal of Hunan University Natural Sciences 41.3(2014):43-48.

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