Structure Design and Numerical Simulation of a High Performance Slit in Soft X-Ray Interference Lithography Beamline at SSRF

	Structure Design and Numerical Simulation of a High Performance Slit in Soft X-Ray Interference Lithography Beamline at SSRF
	Gong X. P.; Lu Q. P.; Peng Z. Q.
	2014
发表期刊	Advances in Mechanical Engineering
ISSN	ISBN/1687-8132
卷号	12
摘要	A high precision slit in ultra-high vacuum is designed to develop a good performance soft X-ray interference lithography (XIL) beamline at Shanghai Synchrotron Radiation Facility (SSRF). In order to define the secondary source and enhance the performance of the beamline, many technical difficulties need resolving to design the precision slit. Therefore, to obtain reasonable design scheme, it is necessary to analyze the structural characteristics, the movement situation, the force state, the thermal load state, and the cooling state of the precision slit deeply by numerical simulation. The simulation results and the testing results demonstrate that the mechanical precision of the slit is at a high level and satisfies the requirements of the beamline.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44395
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Gong X. P.,Lu Q. P.,Peng Z. Q.. Structure Design and Numerical Simulation of a High Performance Slit in Soft X-Ray Interference Lithography Beamline at SSRF[J]. Advances in Mechanical Engineering,2014,12.
APA	Gong X. P.,Lu Q. P.,&Peng Z. Q..(2014).Structure Design and Numerical Simulation of a High Performance Slit in Soft X-Ray Interference Lithography Beamline at SSRF.Advances in Mechanical Engineering,12.
MLA	Gong X. P.,et al."Structure Design and Numerical Simulation of a High Performance Slit in Soft X-Ray Interference Lithography Beamline at SSRF".Advances in Mechanical Engineering 12(2014).

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