Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time

doi:10.1016/j.optcom.2018.03.024

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	Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time
	Yang, C.; Li, Y. H.; Xue, C. X.; Li, X. T.; Yu, H. L.
	2018
发表期刊	Optics Communications
ISSN	0030-4018
卷号	420 页码:122-126
摘要	To improve the grating wavefront quality especially the grating size, which is more than 1 m, we provide a method based on conical diffraction theory and grating groove active control technology to correct the grating substrate surface error. We apply the grating groove active control technology to carry out an echelle grating ruling experiment whose line density is 79 lines/mm in 36th order. Compared with the grating substrate surface error, the grating wavefront value reduces from 0.105 lambda to 0.056 lambda i.e., decreases by 47%. The experimental result proves that the grating substrate surface error compensation method can be used to improve the grating wavefront quality effectively.
关键词	Diffraction grating Phase measurement System design Grating wavefront interferometric control diffraction resolution carriage Optics
DOI	10.1016/j.optcom.2018.03.024
收录类别	SCI ; EI
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/61123
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Yang, C.,Li, Y. H.,Xue, C. X.,et al. Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time[J]. Optics Communications,2018,420:122-126.
APA	Yang, C.,Li, Y. H.,Xue, C. X.,Li, X. T.,&Yu, H. L..(2018).Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time.Optics Communications,420,122-126.
MLA	Yang, C.,et al."Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time".Optics Communications 420(2018):122-126.

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