Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer

doi:10.3788/CJL201845.0804008

CIOMP OpenIR

	Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer
	Zhang, Lu; Xiang, Yang
	2018
发表期刊	Zhongguo Jiguang/Chinese Journal of Lasers
ISSN	2587025
卷号	45 期号:8
摘要	The rotation absolute algorithm is stuided for the grating lateral-shearing interferometer, and the first 36-term Zernike polynomials are used to characterize the asymmetric term in the systemic errors of the shearing setup. The research results show that the relatively ideal measurement precision can be obtained after the systemic errors are removed if the absolute algorithm of surface figure testing is used to the testing of wavefront aberration in lens system. In addition, the RMS of the repeatability of the experimental data can approach 0.14 nm. 2018, Chinese Lasers Press. All right reserved.
关键词	Shearing Aberrations Errors Interferometers Measurement Wavefronts
DOI	10.3788/CJL201845.0804008
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60599
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Zhang, Lu,Xiang, Yang. Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2018,45(8).
APA	Zhang, Lu,&Xiang, Yang.(2018).Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer.Zhongguo Jiguang/Chinese Journal of Lasers,45(8).
MLA	Zhang, Lu,et al."Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer".Zhongguo Jiguang/Chinese Journal of Lasers 45.8(2018).

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