A study of nano-structural effect on the polarization characteristics of metallic sub-wavelength grating polarizers in visible wavelengths

doi:10.1016/j.mee.2020.111327

CIOMP OpenIR

	A study of nano-structural effect on the polarization characteristics of metallic sub-wavelength grating polarizers in visible wavelengths
	Z. Y. Yang,B. Feng,B. R. Lu,Y. F. Chen,W. H. Li,W. Zhang and T. Li
	2020
发表期刊	Microelectronic Engineering
ISSN	0167-9317
卷号	227 页码:5
摘要	The structural effect of subwavelength gratings as the polarizer on the polarization characteristics in visible wavelengths (400-700 nm) is systematically investigated through both numerical simulation with Finite Difference Time Doman algorithm and experiments. The grating parameters such as the material, the pitch, the duty cycle, the height and the cross-sectional shape of the grating are addressed in this work. The optimized range for those parameters is worked out, based on the desired performance margin at the level of 70% transmittance and 50:1 for the extinction ratio. Polarization performance such as the transmittance over 70% and the extinction ratio above 50:1 has been experimentally demonstrated by the 200 nm pitched grating in Al with the height of 150 nm, which was fabricated by high resolution electron beam lithography in this work, guided by the simulation result. Au grating as the polarizer was also compared but ruled out in this work because of the poor performance in polarization. This work is essential in developing grating based polarizers for polarimetric detection and imaging in visible wavelengths.
DOI	10.1016/j.mee.2020.111327
URL	查看原文
收录类别	SCI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64916
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Z. Y. Yang,B. Feng,B. R. Lu,Y. F. Chen,W. H. Li,W. Zhang and T. Li. A study of nano-structural effect on the polarization characteristics of metallic sub-wavelength grating polarizers in visible wavelengths[J]. Microelectronic Engineering,2020,227:5.
APA	Z. Y. Yang,B. Feng,B. R. Lu,Y. F. Chen,W. H. Li,W. Zhang and T. Li.(2020).A study of nano-structural effect on the polarization characteristics of metallic sub-wavelength grating polarizers in visible wavelengths.Microelectronic Engineering,227,5.
MLA	Z. Y. Yang,B. Feng,B. R. Lu,Y. F. Chen,W. H. Li,W. Zhang and T. Li."A study of nano-structural effect on the polarization characteristics of metallic sub-wavelength grating polarizers in visible wavelengths".Microelectronic Engineering 227(2020):5.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
A study of nano-stru（1823KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载